Cassette Stocker, Wafer Transfer and Process Carrier Stocker
This machine was built as a replacement of a competitor’s unit for a major semiconductor manufacturer in Phoenix, Arizona. The competitor’s machine had a severely high failure rate as well as high particle contamination of the wafers. After two years with no improvement, that machine was abandoned and Faith Enterprises was commissioned to build a replacement. Our system was installed in February of 2008 and has performed at over 98% uptime in its first two years of service.
This machine has the ability to be loaded with five 50-wafer lots at one time. Once loaded, it allows a Wet Process tool to process all five lots without any further operator intervention. The operator inputs cassettes two at a time at the Load Port. The wafers are notch-aligned and an OCR camera identifies each lot. Then the cassettes are stocked so that the next pair of cassettes can be input at the Load Port.
At any time, a pair of cassettes can be retrieved by the Stocker Robot and placed on the Wafer Transfer unit where the wafers are transferred to a contiguous, 50-slot process carrier. There the process carrier is handed off to the wet process robot.
When finished wafers are transferred back to the cassettes, a second Stocker unit stores the empty process carrier so that the wet process robot is free to perform other duties. This Stocker can store up to six empty process carriers.